Probing defects at interfaces and interlayers of low-dimensional Si/insulator (HfO2; LaAlO3) structures by electron spin resonance

1Citations
Citations of this article
7Readers
Mendeley users who have this article in their library.
Get full text

Abstract

Electron spin resonance (ESR) spectroscopy enables to assess on atomic scale the nature and structural aspects of interfaces and interlayers in semiconductor/insulator hetero structures. This has been applied to (1 0 0)/insulator entities with nm-thin amorphous layers of HfO2and LaAlO3of high dielectric constant (>12) grown on clean (1 0 0)Si by atomic layer chemical vapor deposition and molecular beam deposition, respectively. Through analysis and monitoring of the occurring embedded paramagnetic point defects, including Pb-type defects, E′, and EX, as a function of VUV irradiation and post-deposition heat treatment, basic information as to the nature, quality, and thermal stability of the interface and interfacial regions has been attained. On the basis of the analysis of Pb-type defects (Pb0, Pb1), archetypal for the Si/SiO2interface, the (1 0 0)Si/LaAlO3stack is found to be truly abrupt, i.e., no evidence for an Si/SiO2(x)-type transition in contrast with the Si/HfO2entity, where the interface is found to be Si/SiO2(x)type in the as-grown state. Analysis as a function of post-deposition heating indicates the Si/LaAlO3interface to remain stable and abrupt up to Tan∼800 °C, above which an Si/SiO2-type interface develops, while that in Si/HfO2evolves to one of closely standard Si/SiO2quality, with an SiO2interlayer of good quality. The differences in behavior of the studied Si/insulator stacks are discussed in a comparative analysis. © 2007 Elsevier B.V. All rights reserved.

Cite

CITATION STYLE

APA

Stesmans, A., & Afanas’ev, V. V. (2007). Probing defects at interfaces and interlayers of low-dimensional Si/insulator (HfO2; LaAlO3) structures by electron spin resonance. Physica B: Condensed Matter, 401402, 550–555. https://doi.org/10.1016/j.physb.2007.09.019

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Save time finding and organizing research with Mendeley

Sign up for free