Progress in fabrication of microcalorimeter arrays: X-ray absorbers and high-density stripline wiring

  • Bruijn M
  • Ridder M
  • Krouwer E
 et al. 
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We report on advances in the fabrication technology of an array of microcalorimeters, to be used in future X-ray spectroscopic space missions. An optimization study was done to form high packing factor, mushroom-shaped, Bi absorbers by evaporation and sputter deposition techniques. The electrical, mechanical and thermal properties of the absorbers were characterized. We show the feasibility of wiring a 250 μm pitch, 32×32 pixel array with low-inductance striplines. A design for a prototype array has been made and fabrication is in progress. © 2005 Elsevier B.V. All rights reserved.

Author-supplied keywords

  • Cryogenic sensor
  • Imaging array
  • Micro machining
  • Microcalorimeter
  • X-ray astronomy
  • X-ray detector
  • XEUS

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  • Marcel P. Bruijn

  • Marcel L. Ridder

  • Eric Krouwer

  • Henk F C Hoevers

  • Piet A J de Korte

  • Jan van der Kuur

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