Quantitative comparison of X-ray fluorescence microtomography setups: Standard and confocal collimator apparatus

  • Chukalina M
  • Simionovici A
  • Zaitsev S
 et al. 
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Recently, there has been a renewed interest for fluorescence spectroscopy, as provided by modern setups which allow 2D and 3D imaging of elemental distributions. Two directions are currently under development: the SR-based fluorescence tomography in polar scanning geometry, provided by the new generation of X-ray microprobes and the confocal scanning geometry, which can be fielded in both SR and laboratory environments. The new probes bring forth a new age in fluorescence spectrometry: high resolution, high intensity and high sensitivity which allow 3D elemental mapping of volumes. The major task now is the development of these complex tools into fully quantitative probes, reproducible and straightforward for general use. In this work we analyze two X-ray fluorescence microtomography techniques: an apparatus tomography using a confocal collimator for the data collection and a standard first generation Computed Tomography (CT) in the parallel scanning scheme. We calculate the deposited dose (amount of energy deposited and distributed in the sample during the data collection time) and find the conditions for the choice of the tomography scheme. © 2007 Elsevier B.V. All rights reserved.

Author-supplied keywords

  • Confocal scanning
  • Deposited dose
  • X-ray fluorescence computer tomography

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  • sergey zaitsevInstitute of Microelectronics Technology and High Purity Materials Russian Academy of Sciences

  • M. Chukalina

  • A. Simionovici

  • C. J. Vanegas

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