Research on fabricating technique of Ba-Al-S:Eu sputtering target

  • DING Z
  • YU Z
  • ZHANG D
 et al. 
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Abstract

Ba-Al-S-Eu sputtering target for blue emitting phosphors was prepared by powder sintering method. XRD patterns showed that the main components of the target were barium tetra aluminum sulfide (BaAl4S7), bariutm sulfide (BaS), and europium sulfide (EuS). In the samples, part of the barium and aluminum are formed into barium aluminum oxide (BaAl2O4) with the impurity element of oxygen. The PL characteristic spectra of the target showed the 470 nm blue emission obviously, and the Ba-Al-S thin films also transmitted a purple-blue emission at the position of 440 nm. The results indicated that this method was suitable for the fabrication of the Ba-Al-S:Eu sputtering target. © 2009 The Chinese Society of Rare Earths.

Author-supplied keywords

  • Ba-Al-S:Eu
  • powder sintering
  • rare earths
  • sputtering target

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