Soft magnetic properties of as-sputtered Fe-Al-O films

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The magnetic and structural properties of as-sputtered nanocrystalline Fe-Al-O films, fabricated by a magnetron sputtering apparatus, are investigated as a function of the sputtering input power. The saturation magnetization of 19.6 kG are obtained in the Fe95.9Al1.5O2.6 film deposited at 4.9 W/cm2, and an effective permeability larger than 1000 at 100 MHz in the wide range of the input power.




Kim, S. R., Kim, K. H., Jang, Y. I., Kim, J., Han, S. H., & Kim, H. J. (2000). Soft magnetic properties of as-sputtered Fe-Al-O films. Journal of Magnetism and Magnetic Materials, 215, 365–367.

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