Soft magnetic properties of as-sputtered Fe-Al-O films

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Abstract

The magnetic and structural properties of as-sputtered nanocrystalline Fe-Al-O films, fabricated by a magnetron sputtering apparatus, are investigated as a function of the sputtering input power. The saturation magnetization of 19.6 kG are obtained in the Fe95.9Al1.5O2.6 film deposited at 4.9 W/cm2, and an effective permeability larger than 1000 at 100 MHz in the wide range of the input power.

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Kim, S. R., Kim, K. H., Jang, Y. I., Kim, J., Han, S. H., & Kim, H. J. (2000). Soft magnetic properties of as-sputtered Fe-Al-O films. Journal of Magnetism and Magnetic Materials, 215, 365–367. https://doi.org/10.1016/S0304-8853(00)00160-8

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