Soft magnetic properties of as-sputtered Fe-Al-O films

  • Kim S
  • Kim K
  • Jang Y
 et al. 
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Abstract

The magnetic and structural properties of as-sputtered nanocrystalline Fe-Al-O films, fabricated by a magnetron sputtering apparatus, are investigated as a function of the sputtering input power. The saturation magnetization of 19.6 kG are obtained in the Fe95.9Al1.5O2.6film deposited at 4.9 W/cm2, and an effective permeability larger than 1000 at 100 MHz in the wide range of the input power.

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Authors

  • S. R. Kim

  • K. H. Kim

  • Y. I. Jang

  • J. Kim

  • S. H. Han

  • H. J. Kim

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