SPM fabrication of nanometerscale ferromagnetic metal-oxide devices

  • Shirakashi J
  • Takemura Y
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Abstract

A novel lithography technique for fabricating ferromagnetic metal/oxide-based electron devices was investigated using scanning probe microscope (SPM) oxidation process. This technique was applied to the surface modification of Ni thin films, and planar-type Ni/Ni oxide/Ni diodes were fabricated. Ni-based diodes clearly showed nonlinear current-voltage (I-V) characteristics. © 2003 Elsevier B.V. All rights reserved.

Author-supplied keywords

  • Ferromagnetic tunnel junction
  • SPM oxidation
  • Scanning probe microscope (SPM)

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Authors

  • Jun Ichi Shirakashi

  • Yasushi Takemura

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