Abstract
The statistics of the emission of sputtered particles is investigated with the Monte Carlo program TRIM SP. The probability of sputtering N atoms with N ≧ 0 per single projectile is determined for a wide range of projectile target combinations (mass ratio), incident ion energies and angles. The distribution of the probability of sputtering N atoms can be reasonable well described by a negative binomial distribution. © 1988.
Cite
CITATION STYLE
APA
Eckstein, W. (1988). Statistics of sputtering. Nuclear Inst. and Methods in Physics Research, B, 33(1–4), 489–492. https://doi.org/10.1016/0168-583X(88)90614-3
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