Submicron microbeam apparatus using a single-ended accelerator with very high voltage stability

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Abstract

The JAERI light-ion microbeam apparatus for high-resolution ion beam analysis was constructed and installed on a beam line of 3 MV single-ended electrostatic accelerator with a high voltage stability of ± 1 × 10-5. In a performance test of the apparatus, the spot size of 0.4 × 0.4 μm2 in FWHM has been achieved so far by using 2 MeV helium ion beam with a target beam current of 77 pA. The light-ion microbeam apparatus and the accelerator system and the beam size measurement using 2 MeV helium ions is described. The ion beam optical design for submicron microbeam is also discussed. © 1995.

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Kamiya, T., Suda, T., & Tanaka, R. (1995). Submicron microbeam apparatus using a single-ended accelerator with very high voltage stability. Nuclear Inst. and Methods in Physics Research, B, 104(1–4), 43–48. https://doi.org/10.1016/0168-583X(95)00399-1

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