The JAERI light-ion microbeam apparatus for high-resolution ion beam analysis was constructed and installed on a beam line of 3 MV single-ended electrostatic accelerator with a high voltage stability of ± 1 × 10-5. In a performance test of the apparatus, the spot size of 0.4 × 0.4 μm2in FWHM has been achieved so far by using 2 MeV helium ion beam with a target beam current of 77 pA. The light-ion microbeam apparatus and the accelerator system and the beam size measurement using 2 MeV helium ions is described. The ion beam optical design for submicron microbeam is also discussed. © 1995.
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