Surface composition of (100)InP substrates bombarded by low energy Ar+ions, studied by AES and EPES

  • Gruzza B
  • Achard B
  • Pariset C
  • 2


    Mendeley users who have this article in their library.
  • 53


    Citations of this article.


The association of Auger electron spectroscopy (AES) and of elastic peak electron spectroscopy (EPES) is used to determine the composition of (100)InP surfaces bombarded with low energy Ar+ions. It appears from a comparison between experimental and theoretical results that a stable InP surface is obtained with a composition of 3 4 In and 1 4 P recovering the last P layer of an alternated stacking of In and P sublayers. © 1985.

Get free article suggestions today

Mendeley saves you time finding and organizing research

Sign up here
Already have an account ?Sign in

Find this document


  • B. Gruzza

  • B. Achard

  • C. Pariset

Cite this document

Choose a citation style from the tabs below

Save time finding and organizing research with Mendeley

Sign up for free