Surface composition of (100)InP substrates bombarded by low energy Ar+ions, studied by AES and EPES

  • Gruzza B
  • Achard B
  • Pariset C
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Abstract

The association of Auger electron spectroscopy (AES) and of elastic peak electron spectroscopy (EPES) is used to determine the composition of (100)InP surfaces bombarded with low energy Ar+ions. It appears from a comparison between experimental and theoretical results that a stable InP surface is obtained with a composition of 3 4 In and 1 4 P recovering the last P layer of an alternated stacking of In and P sublayers. © 1985.

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Authors

  • B. Gruzza

  • B. Achard

  • C. Pariset

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