The association of Auger electron spectroscopy (AES) and of elastic peak electron spectroscopy (EPES) is used to determine the composition of (100)InP surfaces bombarded with low energy Ar+ions. It appears from a comparison between experimental and theoretical results that a stable InP surface is obtained with a composition of 3 4 In and 1 4 P recovering the last P layer of an alternated stacking of In and P sublayers. © 1985.
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