The changes in the surface texture of AT-cut plates with chemical etching were investigated over the temperature range 290-360 K. The activation energy of the etching process was found to be related to the surface smoothness. The variations in the roughness parameters with the depth of etch and the scanning electron micrographs can be understood in terms of directional effects. © 1984.
Tellier, C. R. (1984). Surface texture of chemically etched AT-cut quartz plates. Surface Technology, 21(1), 83–89. https://doi.org/10.1016/0376-4583(84)90150-X