Accelerator based, easily accessible methods are discussed to control and characterize targets and their surfaces by (MeV) ion impact. Independent, but simultaneously applicable techniques such as Rutherford backscattering (RBS), elastic recoil detection (ERD), secondary electron emission (SEE), ion induced Auger electron spectroscopy (IIAES), and particle induced X-ray emission (PIXE) will be shown as tools for bulk and surface analyses. We also present studies of the transformation of the surface conditions, e.g. surface cleaning and smoothing under UHV conditions by heavy-ion sputtering. Possibilities, limitations, and sensitivities of the techniques are discussed. © 1989.
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