Temperature compensation of silicon resonant pressure sensor

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Abstract

In this article, a new method of temperature compensation for resonant pressure sensors is described and preliminary experimental results are presented. The proposed method is based on measurement of resonance frequencies for two different oscillation modes of a single resonator. From these two values, the actual pressure including non-linearity and temperature correction can be calculated.

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APA

Věříš, J. (1996). Temperature compensation of silicon resonant pressure sensor. Sensors and Actuators, A: Physical, 57(3), 179–182. https://doi.org/10.1016/S0924-4247(97)80111-2

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