Chemical vapour deposition of the superconducting phase in the Bi-Sr-Ca-Cu-O system from the halide precursors BiCl3, SrI2, CaI2and CuI has been thermodynamically investigated. The effect of different deposition parameters on the yield of the binary oxides is studied for the individual oxides as well as for simultaneous deposition of all four oxides. For the simultaneous deposition of all four binary oxides, the presence of both H2O and O2is found to be necessary. This is suggested to be true also for deposition of the superconducting phase. The highest yield is obtained when a high total pressure and a low temperature is employed. © 1989.
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