V and N co-doped diamond-like carbon films deposited by pulsed bias arc ion plating

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Abstract

V and N co-doped diamond-like carbon (DLC-VN) composite films were deposited on cemented carbide substrates by pulsed bias arc ion plating. The effects of V and N contents on the structures and properties of the films were investigated by X-ray photoelectron spectroscopy (XPS), Raman spectra, grazing incident X-ray diffraction (GIXRD), transmission electron microscopy (TEM) and nano-indentation, respectively. The as-deposited films consist of a DLC-VN nanocomposite, where VN nanograins are embedded in an amorphous carbon matrix. The V and N contents have significant influences on the relative proportion of VN with respect to DLC. A proper concentration of VN nanocrystals in DLC induces even the formation of nano-diamond. The DLC-VN films have higher hardnesses than pure DLC films, which could be attributed to the nanocomposite structure. © 2010 Elsevier Ltd. All rights reserved.

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Li, H., Hu, J., Lin, G., & Dong, C. (2010). V and N co-doped diamond-like carbon films deposited by pulsed bias arc ion plating. International Journal of Refractory Metals and Hard Materials, 28(4), 544–549. https://doi.org/10.1016/j.ijrmhm.2010.02.014

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