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Anil Kottantharayil

    • 21h-indexImpact measure calculated using publication and citation counts. Updated daily.
    • 1814CitationsNumber of citations received by Anil's publications. Updated daily.

    Recent publications

    • CMP-less integration of Fully Ni-Silicided Metal Gates in FinFETs by simultaneous silicidation of the source, drain, and the gate using a novel dual hard mask approach

      • Anil K
      • Verheyen P
      • Collaert N
      • et al.
    • Integration challenges for multi-gate devices

      • Collaert N
      • Brus S
      • De Keersgieter A
      • et al.

    Co-authors (268)

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