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Bo Peng

  • PHD student
  • Shanghai institute of optics and fine mechanics
  • 1PublicationsNumber of items in Bo's My Publications folder on Mendeley.

Research interests

Optical lithography aberration measurement vector imaging theory

Publications (1)

  • Author ' s personal copy Measurement technique for characterizing odd aberration of lithographic projection optics based on dipole illumination

    • Peng B
    • Wang X
    • Qiu Z
    • et al.
    N/AReaders
    N/ACitations
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Professional experience

PHD student

Shanghai institute of optics and fine mechanics

August 2006 - Present