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Hideaki Yanagida

  • Graduate School of Engineering, Tohoku University
  • 2PublicationsNumber of items in Hideaki's My Publications folder on Mendeley.
  • 3Followers

Recent publications

  • SIMPLE REMOVAL TECHNOLOGY USING OZONE SOLUTION FOR CHEMICALLY-STABLE POLYMER USED FOR MEMS

    • Yanagida H
    • Yoshida S
    • Esashi M
    • et al.
    N/AReaders
    N/ACitations
  • MEMS 用難除去高分子材料のオゾンエッチング

    • Yanagida H
    • Yoshida S
    • Esashi M
    • et al.
    N/AReaders
    N/ACitations

Education

Master Course

Graduate School of Engineering, Tohoku University

April 2009 - Present

Research interests

Following (1)