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Hirotaka Tsuda

  • Engineering
  • Postgraduate (Ph.D Student)
  • Graduate School of Engineering, Kyoto University
  • 2PublicationsNumber of items in Hirotaka's My Publications folder on Mendeley.
  • 2Followers

Research interests

Plasma science Plasma-surface interaction Computer Simulation

About

Born in Kyoto, Japan

Followers (2)

Following (2)

Publications (2)

  • Atomic-scale cellular model and profile simulation of Si etching: Formation of surface roughness and residue

    • Tsuda H
    • Mori M
    • Takao Y
    • et al.
    N/AReaders
    N/ACitations
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  • Molecular-Dynamics-Based Profile Evolution Simulation for Sub-10-nm Si Processing Technology

    • Tsuda H
    • Eriguchi K
    • Ono K
    • et al.
    N/AReaders
    N/ACitations
    Get full text

Professional experience

Postgraduate (Ph.D Student)

Graduate School of Engineering, Kyoto University