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Iacopo Mochi

  • PhD
  • Paul Scherrer Institute
  • 15h-indexImpact measure calculated using publication and citation counts. Updated daily.
  • 669CitationsNumber of citations received by Iacopo's publications. Updated daily.

Research interests

Coherent diffraction imagingExtreme Ultra Violet LithographyInterferometryOptics

Co-authors (247)

  • Maurizio Vannoni

Publications (5)

  • A comparative study of EUV absorber materials using lensless actinic imaging of EUV photomasks

    • Fernandez S
    • Kazazis D
    • Rajeev R
    • et al.
    N/AReaders
    0Citations
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  • Beam drift and partial probe coherence effects in EUV reflective-mode coherent diffractive imaging

    • Helfenstein P
    • Rajeev R
    • Mochi I
    • et al.
    N/AReaders
    0Citations
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  • Chemically amplified EUV resists approaching 11nm half-pitch

    • Tasdemir Z
    • Vockenhuber M
    • Mochi I
    • et al.
    N/AReaders
    0Citations
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  • Through-pellicle inspection of EUV masks

    • Mochi I
    • Helfenstein P
    • Rajeev R
    • et al.
    N/AReaders
    N/ACitations
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  • State-of-the-art EUV materials and processes for the 7nm node and beyond

    • Buitrago E
    • Meeuwissen M
    • Yildirim O
    • et al.
    N/AReaders
    N/ACitations
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Professional experience

Paul Scherrer Institut