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Marian Mankos

  • PhD.
  • Founder
  • Electron Optica, Inc.
  • 12h-indexImpact measure calculated using publication and citation counts. Updated daily.
  • 646CitationsNumber of citations received by Marian's publications. Updated daily.

Other IDs

Research interests

Electron LithographyElectron microscopyElectron Optics

Co-authors (69)

Publications (5)

  • Advances in arrayed microcolumn lithography

    • Muray L
    • Spallas J
    • Stebler C
    • et al.
    N/AReaders
    56Citations
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  • Experimental evaluation of arrayed microcolumn lithography

    • Muray L
    • Lee K
    • Spallas J
    • et al.
    N/AReaders
    16Citations
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  • Multisource optimization of a column for electron lithography

    • Mankos M
    • Coyle S
    • Fernandez A
    • et al.
    N/AReaders
    25Citations
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  • Optimization of microcolumn electron optics for high-current applications

    • Mankos M
    • Lee K
    • Muray L
    • et al.
    N/AReaders
    12Citations
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  • Advanced electron-beam pattern generation technology for 180 nm masks

    • Abboud F
    • Sauer C
    • Wang W
    • et al.
    N/AReaders
    4Citations
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Professional experience

Founder

Electron Optica, Inc.

March 2010 - Present

Principal Scientist

KLA-Tencor

May 2001 - October 2009(8 years)

Senior scientist

Etc Systems/Applied Materials

December 1996 - May 2001(4 years)

postdoc

IBM T.J.Watson Research Center

January 1995 - December 1996(2 years)

Education history

Ph.D.

Arizona State University

January 1991 - December 1994(4 years)