A 2D CMUT hydrophone array: Characterization results

  • Cristman P
  • Oralkan O
  • Zhuang X
 et al. 
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Abstract

As the use of ultrasonic transducers has increased so has the need to measure and characterize their pressure fields. Currently available hydrophones are limited by long scan times, and multiple source pulses to measure large area fields. Using a 2D capacitive micro-machined ultrasonic transducer (CMUT) array and associated electronics we are able to improve on these limitations. The CMUT inherently allows for a tunable sensitivity by changing DC bias. Motivated by the need to improve the characterization of megasonic cleaners used in semiconductor processing we were able to implement such an area hydrophone.

Author-supplied keywords

  • Array
  • CMUT
  • Hydrophone
  • Megasonic cleaning

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Authors

  • P. Cristman

  • O. Oralkan

  • X. Zhuang

  • T. J. Ma

  • S. Vaithilingam

  • T. Carver

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