Abnormal grain growth in 0.75-μm-thick aluminum alloy thin films has been studied using x-ray diffractometry, plan-view and cross-sectional transmission electron microscopy, scanning transmission electron microscopy, and energy dispersive x-ray analysis. Transmission electron microscopy was used with preannealed samples as well as with samples annealed in situ. By varying the deposition temperatures, compositions, and annealing conditions, we have determined the roles of alloying elements in the formation of second-phase precipitates and in promoting abnormal grain growth.
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