Absolute interferometer for three-dimensional profile measurement of rough surfaces

  • Kim B
  • Kim S
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Abstract

We present a new interferometer system devised for surface-profile metrology with multiple two-point-diffraction sources that are made from a pair of single-mode optical fibers. The diffraction interferometer system performs an absolute profile measurement by projecting multiple fringe patterns on the object surface and then fitting the measured phase data into a global model of multilateration. Test measurement results demonstrate that the proposed profiling method is suited for rough surfaces with excessive surface irregularities, which are difficult to measure with conventional two-arm interferometers.

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Authors

  • Byoung-Chang Kim

  • Seung-Woo Kim

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