Acoustic wave sensors: Design, sensing mechanisms and applications

Abstract

Acoustic waves are currently being used in a wide range of sensor fields including physical sensing, chemical sensing and biosensing. Their implementation requires specific knowledge of materials, acoustic wave properties, device design and the sensing mechanisms involved for a wide range of applications. In this paper, the authors report on commonly used acoustic wave devices in sensor applications as well as the design techniques and fabrication processes. Sensing mechanisms and a portable sensor array system are described. The development of IC-based processes, thin-film deposition and sensitive layer fixation will allow for the integration of a total physical and chemical analysis system in the one IC package, leading to the evolution of smart sensors.