Analysis of a MEMS transmission line

Abstract

A microelectromechanical system (MEMS) sound waveguide is considered as a transmission line for RF signals. We analyze a device geometry of a straight one-dimensional microsize silicon rod, where a longitudinal acoustic wave is generated and detected using capacitive transducers. Linear, isotropic, and nondispersive acoustic-wave propagation is assumed. Based on the calculation of the electromechanical impedance, an electrical equivalent model is derived for the acoustic transmission line. A numerical example and a comparison to measured properties of a MEMS - transmission-line resonator shows that the characteristic impedance level of the waveguide is typically high, which causes challenges for matched termination. Solutions to overcome the matching problems are discussed.