We report a bioinspired templating technique for fabricating broadband antireflection coatings that mimic antireflective moth eyes. Wafer-scale, subwavelength-structured nipple arrays are directly patterned on silicon using spin-coated silica colloidal monolayers as etching masks. The templated gratings exhibit excellent broadband antireflection properties and the normal-incidence specular reflection matches with the theoretical prediction using a rigorous coupled-wave analysis ͑RCWA͒ model. We further demonstrate that two common simulation methods, RCWA and thin-film multilayer models, generate almost identical prediction for the templated nipple arrays. This simple bottom-up technique is compatible with standard microfabrication, promising for reducing the manufacturing cost of crystalline silicon solar cells. A solar cell converts absorbed photons into electrical charges. 1 Ideally, a solar cell should absorb all useful pho-tons. However, more than 30% of incident light is reflected back from the surface of single-crystalline ͑SC͒ silicon solar cells which account for 36% of the 2004 production of pho-tovoltaic panels. 2–5 Antireflection coatings ͑ARCs͒ are there-fore widely utilized to improve the conversion efficiencies of silicon solar cells. 1 Quarter-wavelength silicon nitride ͑SiN x ͒ films deposited by expensive plasma enhanced chemical va-por deposition ͑PECVD͒ are the industrial standard for ARCs on silicon substrates. 2 However, commercial SiN x ARCs only exhibit low reflection at wavelengths around 600 nm and the reflection is increased to more than 10% for other wavelengths.
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