Cantilever array sensors

  • Lang H
  • Hegner M
  • Gerber C
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Abstract

Miniaturized microfabricated sensors have enormous potential in gas detection, biochemical analysis, medical applications, quality and process control, and product authenticity issues. Here, we highlight an ultrasensitive mechanical way of converting (bio-)chemical or physical processes into a recordable signal using microfabricated cantilever arrays.

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Authors

  • H Lang

  • M Hegner

  • C Gerber

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