Characterization of thin films and multilayers by specular X-ray reflectivity

  • Plotz W
  • Lischka K
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Abstract

The application of glancing incidence x-ray reflectivity measurements for the investigation of submicrometer thick layers and multilayer stacks which are produced in modern technology processes is discussed. We describe different setups for x-ray reflectivity measurements and computer method swhich allow the extraction of various layer parameters from the experimental data.

Author-supplied keywords

  • multilayer
  • reflectivity
  • thin film
  • thin films

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Authors

  • W.M. M Plotz

  • K. Lischka

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