A contour-mode film bulk acoustic resonator of high quality factor in a liquid environment for biosensing applications

  • Xu W
  • Choi S
  • Chae J
  • 3

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Abstract

This letter reports an acoustic resonator of high quality factors (Qs) operating in liquid media. The film bulk acoustic resonator (FBAR) is made of a ring-shaped piezoelectric aluminum nitride thin film, and is excited in a contour mode. By having a low motional resistance upon coupling with liquids, the contour mode FBAR achieved Qs up to 189, more than 12x over the state-of-the-art FBARs in liquids. The resonator was characterized by an aptamer-thrombin binding pair for a biosensor and showed a mass resolution of 1.78 ng/cm(2).

Author-supplied keywords

  • acoustic resonators
  • aluminium compounds
  • biosensors
  • bulk acoustic wave devices
  • piezoelectric thin films
  • q-factor

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Authors

  • W C Xu

  • S Choi

  • J Chae

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