CVD of SiO , and Related Materials : an Overview

  • Barron A
  • 3


    Mendeley users who have this article in their library.
  • N/A


    Citations of this article.

Author-supplied keywords

  • chemical vapour deposition
  • cvd
  • halides
  • heating the silicon
  • hydrides
  • mercially this primarily involves
  • metal organic compounds
  • mos devices
  • precursors
  • silica
  • silicate gasses
  • so

Get free article suggestions today

Mendeley saves you time finding and organizing research

Sign up here
Already have an account ?Sign in

Find this document

There are no full text links


  • Andrew R Barron

Cite this document

Choose a citation style from the tabs below

Save time finding and organizing research with Mendeley

Sign up for free