Deposition of YBCO and NBCO Films on Areas of 9 Inches in Diameter

  • Utz B
  • Semerad R
  • Bauer M
 et al. 
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-High quality YBazCu307 thin films can be grown by reactive thermal co-evaporation. Combined with a rotating disk heater this method allows to fabricate even double sided homogeneous films on substrate areas up to 9" diameter. A scanning inductive jc probe is used to monitor the homogeneity of critical current densities of typically >2 MA/cm2. Surface resistance values are found to be below 500 63 10 GHz. On biaxially aligned buffer layers on polycrystalline substrates jc values of 1.3 MA/cmz are achieved as well. The properties of Ndl.,Baz+,Cu307 films grown with the same system are presented and evaluated.

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  • B Utz

  • R Semerad

  • M Bauer

  • W Prusseit

  • P Berberich

  • H Kinder

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