-High quality YBazCu307 thin films can be grown by reactive thermal co-evaporation. Combined with a rotating disk heater this method allows to fabricate even double sided homogeneous films on substrate areas up to 9" diameter. A scanning inductive jc probe is used to monitor the homogeneity of critical current densities of typically >2 MA/cm2. Surface resistance values are found to be below 500 63 10 GHz. On biaxially aligned buffer layers on polycrystalline substrates jc values of 1.3 MA/cmz are achieved as well. The properties of Ndl.,Baz+,Cu307 films grown with the same system are presented and evaluated.
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