Determining the elastic modulus and hardness of an ultra-thin film on a substrate using nanoindentation

  • Li H
  • Vlassak J
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Author-supplied keywords

  • corresponding author
  • e-mail
  • edu
  • elastic properties
  • esag
  • harvard
  • nanoindentation
  • substrate effect
  • thin films
  • vlassak

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  • Han Li

  • Joost J Vlassak

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