Dimensional micro and nano metrology

  • Hansen H
  • Carneiro K
  • Haitjema H
 et al. 
  • 145

    Readers

    Mendeley users who have this article in their library.
  • 206

    Citations

    Citations of this article.

Abstract

The need for dimensional micro and nano metrology is evident, and as critical dimensions are scaled down and geometrical complexity of objects is increased, the available technologies appear not sufficient. Major research and development efforts have to be undertaken in order to answer these challenges. The developments have to include new measuring principles and instrumentation, tolerancing rules and procedures as well as traceability and calibration. The current paper describes issues and challenges in dimensional micro and nano metrology by reviewing typical measurement tasks and available instrumentation. Traceability and calibration issues are discussed subsequently. Finally needs and gaps are identified based on these observations.

Author-supplied keywords

  • Dimensional metrology
  • Micro technology
  • Nano technology

Get free article suggestions today

Mendeley saves you time finding and organizing research

Sign up here
Already have an account ?Sign in

Find this document

Authors

Cite this document

Choose a citation style from the tabs below

Save time finding and organizing research with Mendeley

Sign up for free