This paper presents two micro/nano level displacement sensors, which
consist of a mini LDGI (linear diffraction grating interferometer)
and a focus probe. These two sensors are integrated into the spindle
system of a micro/nano-CMM. This micro/nano spindle system is fixed
on a rectangular granite bridge to achieve the z -axis function.
The motion of the spindle is driven by an ultrasonic motor on a precision
cross-roller slide. Its displacement is fed back by the LDGI. A DVD
pick-up head is modified with its S-curve principle as the non-contact
focus probe. Mounting the probe onto the spindle head, it is possible
to achieve a large displacement and nanoresolution measuring spindle
system with a feedback nanomotion control scheme. After accuracy
calibration and error compensation, the spindle motion to 10 mm can
perform 10 nm positioning accuracy and 30 nm measurement accuracy.
Experiments on some ultraprecision profiles have shown the capability
of this spindle system.
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