A displacement spindle in a micro/nano level

Abstract

This paper presents two micro/nano level displacement sensors, which consist of a mini LDGI (linear diffraction grating interferometer) and a focus probe. These two sensors are integrated into the spindle system of a micro/nano-CMM. This micro/nano spindle system is fixed on a rectangular granite bridge to achieve the z-axis function. The motion of the spindle is driven by an ultrasonic motor on a precision cross-roller slide. Its displacement is fed back by the LDGI. A DVD pick-up head is modified with its S-curve principle as the non-contact focus probe. Mounting the probe onto the spindle head, it is possible to achieve a large displacement and nanoresolution measuring spindle system with a feedback nanomotion control scheme. After accuracy calibration and error compensation, the spindle motion to 10 mm can perform 10 nm positioning accuracy and 30 nm measurement accuracy. Experiments on some ultraprecision profiles have shown the capability of this spindle system. © 2007 IOP Publishing Ltd.