Effect of Al2O3 Deposition on Performance of Top-Gated Monolayer MoS 2 based Field Effect Transistor

  • Song J
  • Kim S
  • Woo W
 et al. 
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Author-supplied keywords

  • atomic layer deposition
  • fi eld-e ff ect
  • molybdenum disul fi de
  • transistor
  • transition-metal dichalcogenides
  • two-dimensional materials

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Authors

  • Jeong-Gyu Song

  • Seok Jin Kim

  • Whang Je Woo

  • Youngjun Kim

  • Il-Kwon Oh

  • Gyeong Hee Ryu

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