Effect of Process Pressure on Atomic Layer Deposition of Al 2 O 3

  • Li M
  • Chang Y
  • Wu H
 et al. 
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  • Ming-yen Li

  • Yung-yuan Chang

  • Hsiao-che Wu

  • Cheng-sung Huang

  • Jen-chung Chen

  • Jen-lang Lue

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