The effect of thermoelastic internal friction on the Q of micromachined silicon resonators

  • Roszhart T
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Resonator damping measurements made on flexural beams micromachined
from single-crystal silicon are described. A theoretical analysis
of thermoelastic internal friction that accurately predicts the measurements
that were taken is described. The results of these tests show that
thermoelastic internal friction is a fundamental damping mechanism
that can determine the quality of high-Q resonators over a range
of operating conditions. Single-crystal silicon beams were tested
under vacuum conditions over a range of frequencies from 80 kHz to
1.6 MHz and over a range of temperatures from 300 K to 400 K. measured
values of Q varied from 10000 to more than 70000 and showed good
agreement with theoretical estimates of thermoelastic internal friction.
It is concluded that thermoelastic internal friction is a measurable
phenomenon in micromachined flexures and should be considered when
designing, testing, and evaluating miniature resonators for solid-state

Author-supplied keywords

  • 300 K
  • 80 kHz
  • Damping
  • Friction
  • Silicon
  • internal friction
  • measurement
  • mechanism
  • operating conditions
  • sensor
  • sensors
  • single crystal
  • single crystal silicon
  • temperature
  • testing
  • tests
  • vacuum

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  • T.V. Roszhart

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