Electromechanical transducers at the nanoscale: Actuation and sensing of motion in nanoelectromechanical systems (NEMS)

  • Ekinci K
  • 131

    Readers

    Mendeley users who have this article in their library.
  • 156

    Citations

    Citations of this article.

Abstract

Electromechanical devices are rapidly being miniaturized, following the trend in commercial transistor electronics. Miniature electromechanical devices--now with dimensions in the deep sub-micrometer range--are envisioned for a variety of applications as well as for accessing interesting regimes in fundamental physics. Among the most important technological challenges in the operation of these nanoelectromechanical systems (NEMS) are the actuation and detection of their sub-nanometer displacements at high frequencies. In this Review, we shall focus on this most central concern in NEMS technology: realization of electromechanical transducers at the nanoscale. The currently available techniques to actuate and detect NEMS motion are introduced, and the accuracy, bandwidth, and robustness of these techniques are discussed.

Author-supplied keywords

  • Actuators
  • Nanoelectromechanical systems (NEMS)
  • Nanotechnology sensors

Get free article suggestions today

Mendeley saves you time finding and organizing research

Sign up here
Already have an account ?Sign in

Find this document

Authors

  • K. L. Ekinci

Cite this document

Choose a citation style from the tabs below

Save time finding and organizing research with Mendeley

Sign up for free