Fabrication and characterization of integrated optical waveguides\nin sulfide chalcogenide glasses

  • Viens J
  • Meneghini C
  • Villeneuve A
 et al. 
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This paper reports on the fabrication process of As-S-(Se)-based
chalcogenide glass optical waveguides using three techniques:
photolithography, laser beam writing, and ion implantation. The
fabrication method of the bulk sulfide glasses and the processing of
integrated devices are described and assessed in light of the
propagation characteristics and optical losses in each case

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  • J.-F. Viens

  • C. Meneghini

  • a. Villeneuve

  • T.V. Galstian

  • E.J. Knystautas

  • M.a. Duguay

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