Fabrication and laser patterning of polystyrene optical oxygen sensor films for lab-on-a-chip applications

  • Grist S
  • Oyunerdene N
  • Flueckiger J
 et al. 
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Abstract

Fabrication process flow for the new oxygen sensor fabrication and patterning process.

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Authors

  • S. M. Grist

  • N. Oyunerdene

  • J. Flueckiger

  • J. Kim

  • P. C. Wong

  • L. Chrostowski

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