Flexible and semi-transparent high performance thermoelectric energy harvesters are fabricated on low cost bulk mono-crystalline silicon (100) wafers. The released silicon is only 3.6% as thick as bulk silicon reducing the thermal loss significantly and generating nearly 30% more output power than unpeeled harvesters. This generic batch processing is a pragmatic way of transforming traditional silicon circuitry for extremely deformable high-performance integrated electronics. © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
CITATION STYLE
Sevilla, G. A. T., Inayat, S. B., Rojas, J. P., Hussain, A. M., & Hussain, M. M. (2013). Flexible and semi-transparent thermoelectric energy harvesters from low cost bulk silicon (100). Small, 9(23), 3916–3921. https://doi.org/10.1002/smll.201301025
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