The floating gate measurement technique for characterization of capacitor matching

  • Tuinhout H
  • Elzinga H
  • Brugman J
 et al. 
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This paper discusses a new method for characterization of matching
of capacitors using the so-called floating gate capacitance measurement
method. After an introduction of this measurement method, modifications
are discussed that were implemented to boost the measurement accuracy
and repeatability from its original thousands of ppm's (0.1 to 0.3%) to
values as low as 50 ppm (0.005%). Instrumental in these improvements are
the introduction of a double slope measurement procedure to compensate
for systematic offsets, as well as the use of repeated measurements and
averaging to reduce the influence of the measurements system's noise.
The improved accuracy, including statistical characterization of the
measurement system's short term repeatability, are required for correct
determination of capacitor matching of the extremely well-matching
double-polysilicon capacitor structures that were used for this study

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  • Hans P. Tuinhout

  • Heinze Elzinga

  • J. T. Brugman

  • Fokke Postma

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