Formation of nanofibers on the surface of diamond-like carbon films by RF oxygen plasma etching

  • Harigai T
  • Koji H
  • Furuta H
 et al. 
  • 1

    Readers

    Mendeley users who have this article in their library.
  • N/A

    Citations

    Citations of this article.

Get free article suggestions today

Mendeley saves you time finding and organizing research

Sign up here
Already have an account ?Sign in

Authors

  • T Harigai

  • H Koji

  • H Furuta

  • A Hatta

Cite this document

Choose a citation style from the tabs below

Save time finding and organizing research with Mendeley

Sign up for free