Gallium nitride based transistors

  • Xing H
  • Keller S
  • Wu Y
 et al. 
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An overview is presented of progress in GaN electronic devices along with recent results from work at UCSB. From 1995 to 2001, the power performance ofAlGaN/GaNhigh electron mobility transistors (HEMT) improved from 1.1 to 11 Wmm⁻¹, respectively. The disadvantage of the lowthermal conductivity of the sapphire substrate was mitigated by flip-chip bonding onto AlN substrates, yielding large periphery devices with an output power of 7.6 W. A variety of HEMT amplifier circuits have been demonstrated. The first AlGaN/GaN heterojunction bipolar transistor (HBT) was demonstrated in 1998, with a current gain of about 3. By developing the technique of emitter regrowth, a current gain of 10 was achieved in both GaN BJTs and AlGaN/GaN HBTs. A common emitter current gain cutoff frequency of 2 GHz was measured. Critical issues involved in the growth of high quality AlGaN/(AlN)/GaN heterostructures and GaN:Mg by metal–organic chemical vapour deposition (MOCVD) and molecular beam epitaxy (MBE) and the device fabrication are discussed.

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  • H. Xing

  • Stacia Keller

  • Y.-F. Wu

  • L. McCarthy

  • I. P. Smorchkova

  • D. Buttari

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