Hard boron oxide thin film deposition using electron cyclotron resonance microwave plasmas

  • Gorbatkin S
  • Rhoades R
  • 2


    Mendeley users who have this article in their library.
  • N/A


    Citations of this article.

Get free article suggestions today

Mendeley saves you time finding and organizing research

Sign up here
Already have an account ?Sign in

Find this document


  • SM Gorbatkin

  • RL Rhoades

Cite this document

Choose a citation style from the tabs below

Save time finding and organizing research with Mendeley

Sign up for free