The optical properties and structure of hydrophobic antireflective coatings (AR) deposited from silica sol and HMDS and MTMS were characterized in detail in this study. The influence of sol modification parameters on the antireflective behaviour of coatings has been investigated. For the characterization of hydrophobic coatings the water contact angle measurements, UV-visible spectroscopy and atomic force microscopy were used. HMDS modified silica coating show the highest contact angle (165°) due to its better hydrophobic covering. It was determined that the hydrophobic HMDS modified coatings reduced reflectance as well as unmodified silica AR coatings. The Nd:YAG laser damage threshold of AR modified silica coating exceeded 35 J/cm 2 at 1064 nm.
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