Indentation hardnesses of semiconductors and a scaling rule

  • Yonenaga I
  • Suzuki T
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Abstract

The Vickers hardnesses of 15 semiconductors, namely Si, Ge, SiC, AlN, GaN, GaP, GaAs, GaSb, InP, InAs, InSb, ZnO, ZnSe, ZnTe and CdTe, have been investigated from room temperature to their melting points. The temperature dependences of the Vickers hardness H V of 11 of these semiconductors, namely those with a cubic structure, obey a universal relationship when H V and the temperature T are scaled respectively by the shear modulus G and by Gb 3 / k B, with b being the magnitude of the Burgers vector. The scaling rule is the same as that found for the temperature dependence of the critical shear stress ‰ c for the {111} slip system, satisfying the relationship H V = (70-100) ‰ c .

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