Indium incorporation during the growth of InGaN by molecular-beam epitaxy studied by reflection high-energy electron diffraction intensity oscillations

  • Adelmann C
  • Langer R
  • Feuillet G
 et al. 
  • 39

    Readers

    Mendeley users who have this article in their library.
  • 47

    Citations

    Citations of this article.

Abstract

The indium incorporation in hexagonal InGaN grown by plasma assisted molecular-beam epitaxy is studied by means of reflection high-energy electron diffraction ?RHEED? intensity oscillations. It is demonstrated that, in addition to being incorporated in the alloy, indium acts as a surfactant, significantly changing the gallium incorporation. This surfactant effect has to be taken into account to allow for a precise in situ determination of the alloy composition. The indium concentrations determined in situ by RHEED intensity oscillations were found to be in good agreement with ex situ results of Rutherford backscattering spectroscopy. This method also allows us to directly assess the maximum In incorporation as a function of the substrate temperature. ©

Get free article suggestions today

Mendeley saves you time finding and organizing research

Sign up here
Already have an account ?Sign in

Find this document

Authors

  • C. Adelmann

  • R. Langer

  • G. Feuillet

  • B. Daudin

Cite this document

Choose a citation style from the tabs below

Save time finding and organizing research with Mendeley

Sign up for free