Instrumentation and Methodology for MEMS Testing, Reliability Assessment and Failure Analysis

  • DeWolf I
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Abstract

In this paper some instrumentation and methodology for testing, reliability
assessment and failure analysis of MEMS is discussed. Well-known
instruments such as atomic force microscopy and scanning electron
microscopy are mentioned, but the main focus is on specific MEMS
instrumentation. (34 References)

Author-supplied keywords

  • Application
  • Atomic force microscopy
  • Failure analysis
  • MEMS
  • MEMS testing
  • Micromechanical devices
  • Reliability
  • Scanning electron microscopy
  • Semiconductor device packaging
  • Semiconductor device reliability
  • Semiconductor device testing
  • failure
  • instrumentation
  • reliability assessment
  • testing

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Authors

  • I DeWolf

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