Abstract
In this paper some instrumentation and methodology for testing, reliability assessment and failure analysis of MEMS is discussed. Well-known instruments such as atomic force microscopy and scanning electron microscopy are mentioned, but the main focus is on specific MEMS instrumentation.
Cite
CITATION STYLE
APA
De Wolf, I. (2004). Instrumentation and methodology for MEMS testing, reliability assessment and failure analysis. In Proceedings of the International Conference on Microelectronics (Vol. 24 I, pp. 57–63). https://doi.org/10.1109/icmel.2004.1314558
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